MENG 5314 Micro Electro Mechanical Systems (MEMS)
This course introduces the students to principles, modeling, interfacing and signal conditioning of micro-electro-mechanical systems (MEMS) such as motion sensors and actuators. It also covers basic electronic devices, MEMS resonators, embedded microprocessor systems and control, power transfer components and mechanism design. The course provides knowledge in the analysis and design of hardware-in-the-loop through simulation and rapid prototyping of real-time closed-loop computer control of electromechanical systems.